SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of a Standard before purchasing. SEMI Standards currently use PDF file format and are DRM-protected, which requires Adobe Acrobat Reader and the FileOpen Plug-In. Refer to the DRM FAQs for details.


Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

 

Artificial Intelligence (AI) Use Prohibited: You may not use the SEMI Standards, or any portion thereof, as input to any artificial intelligence or machine learning system, or for the purpose of training, testing, or improving any AI model. You also may not use AI to create derivative works, adaptations, or other materials derived from or substantially based on SEMI Standards, including but not limited to annotations, outlines, training materials, reference guides, or transformed versions, in any form or for any purpose. Any violation of this policy constitutes a breach and will result in suspended access to SEMI Standards.

C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional)
SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional) Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00347 - SEMI C3.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality
SEMI C3.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality
SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality
SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00351 - SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality
SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00352 - SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality
SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality
SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4)
SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00355 - SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality
SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00356 - SEMI C3.56 - Specification for Diborane Mixtures
SEMI C3.56 - Specification for Diborane Mixtures Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
C00602 - SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
C00603 - SEMI C6.3 - Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
C00604 - SEMI C6.4 - Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More