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SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI E138 - Specification for XML Semiconductor Common Components
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F57 - Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
Sale priceMember Price: ¥225
Non-Member Price: ¥62,700
Non-Member Price: ¥62,700
SEMI F39 - Guide for Chemical Blending Systems
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
Regular price¥49,500 JPY
Sale price¥31,900 JPY
SEMI D72 - Test Method for Color Properties of Electronic Paper Displays
Sale priceMember Price: ¥135
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F60 - 不動態化した316Lステンレス・スチール部品の接ガス表面の組成をESCAにより評価する試験方法
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-LINK® IE
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E125 - Specification for Equipment Self Description (EqSD)
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Member Price : ¥113
SEMI E169 - 装置情報システムセキュリテイのためのガイド
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F30 - Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F107 - Guide for Process Equipment Adapter Plates
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E133 - Specification for Automated Process Control Systems Interface
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F57 - 超純水および薬液供給システム内に使用するポリマー製材料および部品の仕様
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI E70 - Guide for Tool Accommodation Process
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E168 - Specification for Product Time Measurement
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI E54.3 - マスフローデバイスのためのセンサ／アクチュエータネットワーク（SAN）独自のデバイスモデルのためのスタンダード
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900