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SEMI F22 - Guide for Bulk and Specialty Gas Distribution Systems
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F23 - Specification for Particle Concentration of Grade 10/0.2 Hydrogen
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F23 - グレード10/0.2 引火性特殊ガスの粒子に関する仕様
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI F24 - Specification for Particle Concentration of Grade 10/0.2 Inert Specialty Gases
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F25 - Specification for Particle Concentration of Grade 10/0.2 Oxidant Specialty Gases
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F26 - Specification for Particle Concentration of Grade 10/0.2 Toxic Specialty Gases
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F27 - ガス配分システムおよび部品の水分相互作用および含有量の大気圧電離質量分析（APIMS）による，テスト方法
Regular price¥59,400 JPY
Sale price¥38,100 JPY
SEMI F28 - Test Method for Measuring Particle Generation from Process Panels
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F28 - プロセスパネルからのパーティクル発生を測定するテスト方法
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F29 - ガスソースシステムパネルのパージ効果のテスト方法
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI F30 - Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F30 - 据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI F31 - Guide for Bulk Chemical Distribution Systems
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F32 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F33 - 気圧イオン化質量分析計（APIMS）の較正のためのテスト方法
Regular price¥59,400 JPY
Sale price¥38,100 JPY
SEMI F34 - Guide for Liquid Chemical Pipe Labeling
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F34 - 液体化学薬品配管ラベリングに関するガイド
Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
Non-Member Price: ¥38,100
SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900
SEMI F35 - 非浸入式酸素測定を使用した超高純度ガス分配システムの安全性を確認するためのテスト方法
Regular price¥59,400 JPY
Sale price¥38,100 JPY
SEMI F36 - Guide for Dimensions and Connections of Gas Distribution Components
Sale priceMember Price: ¥113
Non-Member Price: ¥31,900
Non-Member Price: ¥31,900