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SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F9 - Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E10 - 半導体製造装置の信頼性，有用性，整備性（RAM），利用性の定義と測定のための仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
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Non-Member Price: $193.00
SEMI E90 - 기판 추적 사양
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E28 - マスフローコントローラの圧力仕様のガイドライン
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI MS3 - Terminology for MEMS Technology
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SEMI F46 -
Sale priceMember Price: $135.00
Non-Member Price: $180.00
Non-Member Price: $180.00
SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials
Regular price$300.00 USD
Sale price$193.00 USD
SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems
Regular price$300.00 USD
Sale price$193.00 USD
SEMI F94 - 1.5インチタイプ4ファスナー構造サーフェスマウント型ガス供給システム用2ポートコンポーネント（MFC/MFMを除く）の寸法のための仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI S15 - 有毒及易燃氣體偵測系統評估之安全基準
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E134 - データ収集管理の仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F88 - Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E90 - 基板トラッキングの仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E137 - 半導体製造装置の最終組立，梱包，輸送，開梱，クリーンルームの製造領域への移送のためのガイド
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI S19 - 製造装置の設置，保守，サービス要員のトレーニングのための安全ガイドライン
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E19.5 - Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF)
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E72 - 300 mm装置の床面積，高さ，重量の仕様ならびにガイド
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様
Regular price$360.00 USD
Sale price$231.00 USD