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SEMI E151 - Guide for Understanding Data Quality
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E151 - データ品質を理解するためのガイド
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E153 - AMHS SEMの仕様（AMHS SEM）
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E153 - Specification for AMHS SEM (AMHS SEM)
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E154 - Specification for Mechanical Features of 450 mm Load Port
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E157 - Specification for Module and Substrate Process Tracking
Sale price
Member Price : $113.00
SEMI E157 - モジュールプロセストラッキングの仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア（450FOUP）とキネマティックカプリングの機械仕様
Sale price
Member Price : $135.00
SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E160 - Specification for Communication of Data Quality
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E161 - Guide for Identification and Classification of Training Tiers
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E161 - トレーニング階層の明確化および分類に関するガイド
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E163 - 特別に指定されたエリア内のレチクルおよびその他の静電気超敏感性（EES：EXTREMELY ELECTROSTATIC SENSITIVE）アイテムの取り扱いのためのガイド
Sale priceMember Price: $135.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E164 - Specification for EDA Common Metadata
Sale priceMember Price: $113.00
Non-Member Price: $193.00
Non-Member Price: $193.00